High k Gate Dielectrics

High k Gate Dielectrics

Forfatter: Michel Houssa
Forlag: CRC Press
Utgave: 1
Utgivelsesår: 2003
ISBN: 9780367454449

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The drive toward smaller and smaller electronic componentry has huge implications for the materials currently being used. As quantum mechanical effects begin to dominate, conventional materials will be unable to function at scales much smaller than those in current use. For this reason, new materials with higher electrical permittivity will be requ

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