Plasma Deposited Thin Films

Plasma Deposited Thin Films

Author: J. Mort, F. Jansen
Publisher: CRC Press
Edition: 1
Published date: 2018
ISBN: 9781315896717

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In Summary, the objective of this book is to present in one volume a review of the plasma deposition process and the present understanding of the most important and widely used plasma deposited thin film materials, devices and their applications.

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