Handbook of Silicon Semiconductor Metrology

Handbook of Silicon Semiconductor Metrology

Author: Alain C. Diebold
Publisher: CRC Press
Edition: 1
Published date: 2001
ISBN: 9780824705060

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Containing more than 300 equations and nearly 500 drawings, photographs, and micrographs, this reference surveys key areas such as optical measurements and in-line calibration methods. It describes cleanroom-based measurement technology used during the manufacture of silicon integrated circuits and covers model-based, critical dimension, overlay

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