Lithography is now a complex tool at the heart of a technological process for manufacturing micro and nanocomponents. A multidisciplinary technology, lithography continues to push the limits of optics, chemistry, mechanics, micro and nano-fluids, etc.
This book deals with essential technologies and processes, primarily used in industrial manufacturing of microprocessors and other electronic components.
Pages: 320
Category: Ingenjörsvetenskap
e-ISBN: 9781118621189
Shipping weight: 1.2 kg
Ships in: 1-2 days
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