Luminous Chemical Vapor Deposition and Interface Engineering

Luminous Chemical Vapor Deposition and Interface Engineering

Author: Hirotsugu Yasuda
Publisher: CRC Press
Edition: 1
Published date: 2004
ISBN: 0824757882

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Providing in-depth coverage of the technologies and various approaches, Luminous Chemical Vapor Deposition and Interface Engineering showcases the development and utilization of LCVD procedures in industrial scale applications. It offers a wide range of examples, case studies, and recommendations for clear understanding of this innovative science.

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