Handbook of Surface and Nanometrology

Handbook of Surface and Nanometrology

Author: David J. Whitehouse
Publisher: CRC Press
Edition: 2
Published date: 2010
ISBN: 9781420082012

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Since the publication of the first edition, miniaturization and nanotechnology have become inextricably linked to traditional surface geometry and metrology. This interdependence of scales has had profound practical implications.Updated and expanded to reflect many new developments, Handbook of Surface and Nanometrology, Second Edition determines h

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