Plasma Electronics

Plasma Electronics

Forfatter: Toshiaki Makabe, Zoran Lj. Petrovic
Forlag: CRC Press
Utgave: 2
Utgivelsesår: 2014
ISBN: 9781138034150

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Beyond enabling new capabilities, plasma-based techniques, characterized by quantum radicals of feed gases, hold the potential to enhance and improve many processes and applications. Following in the tradition of its popular predecessor, Plasma Electronics, Second Edition: Applications in Microelectronic Device Fabrication explains the fundamental

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