Adhesion Aspects in MEMS/NEMS

Adhesion Aspects in MEMS/NEMS

Forfatter: Seong H. Kim, Kash L. Mittal, Michael T. Dugger
Forlag: CRC Press
Utgave: 1
Utgivelsesår: 2011
ISBN: 9780367445942

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Phenomena associated with the adhesion interaction of surfaces have been a critical aspect of micro- and nanosystem development and performance since the first MicroElectroMechanicalSystems(MEMS) were fabricated. These phenomena are ubiquitous in nature and are present in all systems, however MEMS devices are particularly sensitive to their effects

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