Wafer Manufacturing

Wafer Manufacturing

Auteur: Imin Kao, Chunhui Chung
Uitgever: Wiley
Editie: 1
Publicatiedatum: 2021
ISBN: 9780470061213

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Presenting all the major stages in wafer manufacturing, from crystals to prime wafers.

This book first outlines the physics, associated metrology, process modelling and quality requirements and the goes on to discuss wafer forming and wafer surface preparation techniques.  The whole is rounded off with a chapter on the research and future challenges in wafer manufacturing.

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