Nanofabrication by Ion-Beam Sputtering

Nanofabrication by Ion-Beam Sputtering

Autor: Tapobrata Som, Dinakar Kanjilal
Verlag: Jenny Stanford Publishing
Ausgabe: 1
Erscheinungsdatum: 2012
ISBN: 9789814303750

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Considerable attention has been paid to ion beam sputtering as an effective way to fabricate self-organized nano-patterns on various substrates. The significance of this method for patterning surfaces is that the technique is fast, simple, and less expensive. The possibility to create patterns on very large areas at once makes it even more attracti

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