Particle Control for Semiconductor Manufacturing

Particle Control for Semiconductor Manufacturing

Autor: R.P. Donovan
Verlag: CRC Press
Ausgabe: 1
Erscheinungsdatum: 2018
ISBN: 9780824782429

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There is something Alice-in-Wonderlandish about powerful and vital computer systems being shut down by a microscopic mote that a hay-feverist wouldn't sneeze at, but as computer chips get smaller, smaller and smaller particles on their surface have a larger and larger effect on their performance. In

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