Measurement Technology for Micro-Nanometer Devices

Measurement Technology for Micro-Nanometer Devices

Autor: Wendong Zhang, Xiujian Chou, Tielin Shi, Zongmin Ma, Haifei Bao, Jingdong Chen, Liguo Chen, Dachao Li, Chenyang Xue
Verlag: Wiley
Ausgabe: 1
Erscheinungsdatum: 2016
ISBN: 9781118717967

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A fully comprehensive examination of state-of-the-art technologies for measurement at the small scale

• Highlights the advanced research work from industry and academia in micro-nano devices test technology
• Written at both introductory and advanced levels, provides the fundamentals and theories
• Focuses on the measurement techniques for characterizing MEMS/NEMS devices

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