Compact Plasma and Focused Ion Beams

Compact Plasma and Focused Ion Beams

Autore: Sudeep Bhattacharjee
Editore: CRC Press
Edizione: 1
Data di pubblicazione: 2013
ISBN: 9781138033672

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This book discusses method to produce compact microwave plasma by overcoming challenges posed by geometrical cutoff of waveguide and density cutoff of plasma alongwith the properties of such compact plasmas. It also brings out a new area of applications where such compact high densities plasmas are utilized for multi-element focused ion beams.

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