Plasma Deposited Thin Films

Plasma Deposited Thin Films

Forfatter: J. Mort, F. Jansen
Forlag: CRC Press
Udgave: 1
Udgivelsesdato: 2018
ISBN: 9781315896717

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In Summary, the objective of this book is to present in one volume a review of the plasma deposition process and the present understanding of the most important and widely used plasma deposited thin film materials, devices and their applications.

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